The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2011
Filed:
Nov. 07, 2007
Martin L. Zucker, Orinda, CA (US);
Daniel J. Devine, Los Gatos, CA (US);
Vladimir Nagorny, Tracy, CA (US);
Jonathan Mohn, Saratoga, CA (US);
Martin L. Zucker, Orinda, CA (US);
Daniel J. Devine, Los Gatos, CA (US);
Vladimir Nagorny, Tracy, CA (US);
Jonathan Mohn, Saratoga, CA (US);
Mattson Technology, Inc., Fremont, CA (US);
Abstract
A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.