The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
May. 22, 2006
Applicants:
Marco Koert Stavenga, Eindhoven, NL;
Hans Jansen, Eindhoven, NL;
Peter Franciscus Wanten, Mierlo, NL;
Johannes Wilhelmus Jacobus Leonardus Cuijpers, Roermond, NL;
Raymond Gerardus Marius Beeren, Dalhem, BE;
Inventors:
Marco Koert Stavenga, Eindhoven, NL;
Hans Jansen, Eindhoven, NL;
Peter Franciscus Wanten, Mierlo, NL;
Johannes Wilhelmus Jacobus Leonardus Cuijpers, Roermond, NL;
Raymond Gerardus Marius Beeren, Dalhem, BE;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); B08B 3/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.