The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
Sep. 13, 2007
Applicants:
Yin-min Felicia Goh, Singapore, SG;
Zainab Ismail, Singapore, SG;
Yong Siang Tan, Singapore, SG;
Ling Zhi Tan, Singapore, SG;
Sin Ping Chiew, Kuala Lumpur, MY;
Inventors:
Yin-Min Felicia Goh, Singapore, SG;
Zainab Ismail, Singapore, SG;
Yong Siang Tan, Singapore, SG;
Ling Zhi Tan, Singapore, SG;
Sin Ping Chiew, Kuala Lumpur, MY;
Assignee:
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 3/10 (2006.01); B08B 3/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
An integrated circuit system includes providing an integrated circuit wafer; applying a first cleaning solution over the integrated circuit wafer; and applying a second cleaning solution over the integrated circuit wafer to prevent or remove a defect resulting from the first cleaning process.