The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2011
Filed:
Aug. 29, 2005
Minoru Dogi, Kanagawa, JP;
Hideyuki Odagi, Kanagawa, JP;
Tetsuya Shimada, Kanagawa, JP;
Masahiro Matsumoto, Chiba, JP;
Minoru Dogi, Kanagawa, JP;
Hideyuki Odagi, Kanagawa, JP;
Tetsuya Shimada, Kanagawa, JP;
Masahiro Matsumoto, Chiba, JP;
Ulvac, Inc, Kanagawa, JP;
Abstract
There is provided a film forming apparatus which is capable of forming a film on both surfaces of a substrate by sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher. In a film forming chamberthe pressure of which is controlled, while a rotating drumis rotated by the driving of a drive motor, a film is formed on the top surface of a substrateon a substrate trayheld on a substrate holderby cathodesandfor outer surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, and also a film is formed on the back surface of the substrateon the substrate trayheld on the substrate holderby cathodesandfor inner surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, by which a high-quality film is formed on both surfaces of the substrateby sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile