The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
May. 23, 2008
Lawrence S. Melvin, Iii, Hillsboro, OR (US);
Brian S. Ward, Austin, TX (US);
Kunal N. Taravade, Portland, OR (US);
Lawrence S. Melvin, III, Hillsboro, OR (US);
Brian S. Ward, Austin, TX (US);
Kunal N. Taravade, Portland, OR (US);
Synopsys, Inc., Mountain View, CA (US);
Abstract
One embodiment of the present invention provides techniques and systems for modeling long-range extreme ultraviolet lithography (EUVL) flare. During operation, the system may receive an evaluation point in a layout. Next, the system may receive an EUVL model which includes kernels that are discretized at different sampling rates, and which have different sized ambits. Specifically, a kernel that is discretized using a low sampling rate may have a longer range than a kernel that is discretized using a high sampling rate. The system may then convolve the kernels with the layout at the evaluation point over their respective ambits. Next, the system may use the convolution results to determine an indicator value. The indicator value can be used for a number of applications, e.g., to predict pattern shapes that are expected to print on a wafer, to perform optical proximity correction, or to identify manufacturing problem areas in the layout.