The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2011
Filed:
Sep. 30, 2008
Wilhelm Egle, Aalen, DE;
Wolfgang Hafner, Koenigsbronn, DE;
Willi Anderl, Huettlingen, DE;
Ulrich Bingel, Lauterburg, DE;
Holger Muenz, Aalen-Wasseralfingen, DE;
Thomas Neidhardt, Heidenheim, DE;
Wilhelm Egle, Aalen, DE;
Wolfgang Hafner, Koenigsbronn, DE;
Willi Anderl, Huettlingen, DE;
Ulrich Bingel, Lauterburg, DE;
Holger Muenz, Aalen-Wasseralfingen, DE;
Thomas Neidhardt, Heidenheim, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.