The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Feb. 15, 2008
Qing Su, Sunnyvale, CA (US);
Subarnarekha Sinha, Foster City, CA (US);
Charles C. Chiang, Saratoga, CA (US);
Qing Su, Sunnyvale, CA (US);
Subarnarekha Sinha, Foster City, CA (US);
Charles C. Chiang, Saratoga, CA (US);
Synopsys, Inc., Mountain View, CA (US);
Abstract
Method and apparatus for approximating the average critical area of a layout or layout region, involving summing, over all the object segments of interest, respective critical area contribution values that are dependent upon particular layout parameters of the objects, each of the contribution values being representative of a plurality of defect sizes, and being defined such that for each defect size in the plurality of defect sizes, and for a particular defect type, the contribution values collectively count all critical areas arising due to the object segments of interest only once.