The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Nov. 25, 2008
Jörg Krempel-hesse, Eckartsborn, DE;
Andreas Jischke, Kahl, DE;
Uwe Schüβler, Aschaffenburg, DE;
Hans Wolf, Erlensee, DE;
Jörg Krempel-Hesse, Eckartsborn, DE;
Andreas Jischke, Kahl, DE;
Uwe Schüβler, Aschaffenburg, DE;
Hans Wolf, Erlensee, DE;
Applied Films GmbH & Co., Alzenau, DE;
Abstract
Claimed is a sputtering target system comprising a plurality of backing plates to be individually cooled. Each backing plate is provided on its back side with a meandering groove that is closed off by a sealing plate. The sealing plate is welded around its circumference to the backing plate and at the same time is welded to at least one ridge located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate.