The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2011
Filed:
Jan. 03, 2008
Applicant:
Larry A. Spiegel, San Luis Obispo, CA (US);
Inventor:
Larry A. Spiegel, San Luis Obispo, CA (US);
Assignee:
Strasbaugh, San Luis Obispo, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B24B 1/00 (2006.01); B24B 5/02 (2006.01); B24B 5/35 (2006.01);
U.S. Cl.
CPC ...
Abstract
A flexible membrane assembly for a wafer carrier in a CMP system. The flexible membrane assemble has a flat, flexible membrane joined to a rigid cylindrical sidewall.