The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
May. 26, 2006
Toshio Ando, Ishikawa, JP;
Takayuki Uchihashi, Ishikawa, JP;
Noriyuki Kodera, Ishikawa, JP;
Hayato Yamashita, Ishikawa, JP;
Toshio Ando, Ishikawa, JP;
Takayuki Uchihashi, Ishikawa, JP;
Noriyuki Kodera, Ishikawa, JP;
Hayato Yamashita, Ishikawa, JP;
National University Corporation Kanazawa University, Ishikawa, JP;
Abstract
A driving laser unit () irradiates a laser beam on a cantilever () to cause thermal expansion deformation. A driving-laser control unit () performs feedback control for the cantilever () by controlling intensity of the laser beam on the basis of displacement of the cantilever () detected by a sensor (). A thermal-response compensating circuit () has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever () and compensates for a delay in a thermal response of the cantilever () to the light irradiation. Moreover, the cantilever () may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.