The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Aug. 21, 2007
Applicants:
Christopher P. Ausschnitt, Lexington, MA (US);
Richard H. Broberg, Wellesley, MA (US);
David A. Crow, Maple Grove, MN (US);
William A. Muth, Lagrangeville, NY (US);
Keith E. Roberts, Cambridge, MA (US);
Inventors:
Christopher P. Ausschnitt, Lexington, MA (US);
Richard H. Broberg, Wellesley, MA (US);
David A. Crow, Maple Grove, MN (US);
William A. Muth, Lagrangeville, NY (US);
Keith E. Roberts, Cambridge, MA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01);
U.S. Cl.
CPC ...
Abstract
A method for fabricating parts using a photolithography system, includes: performing a search of normalization data for an estimated dose operating point; and using the estimated dose operating point for fabrication of new parts.