The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2011
Filed:
Dec. 18, 2007
Applicant:
Steven George Barbee, Amenia, NY (US);
Inventor:
Steven George Barbee, Amenia, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/00 (2006.01); G06N 5/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Embodiments of the invention may be used to produce a data mining signal by generating hybrid dataset representing data related to tools used during a semiconductor fabrication process. By selectively combining similar processes, the data mining signal strength of each tool used to perform the steps of the fabrication process may be increased. A combined process variable may be used to represent the group of tools and processes, collectively. A set of rules may be composed to determine which processes used in the semiconductor fabrication process should be combined in the hybrid dataset.