The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2011
Filed:
Oct. 31, 2008
Marvin R. Lafontaine, Kingston, NH (US);
Ari Eiriksson, South Hamilton, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
William D. Lee, Newburyport, MA (US);
Marvin R. LaFontaine, Kingston, NH (US);
Ari Eiriksson, South Hamilton, MA (US);
Ashwin M. Purohit, Gloucester, MA (US);
William D. Lee, Newburyport, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An electrostatic chuck and method for clamping and de-clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. An arc pin operably coupled to the clamping plate and a power source provides an arc for penetrating an insulating layer of the workpiece. The arc pin is selectively connected to an electrical ground, wherein upon removal of the insulative layer of the workpiece, the arc pin provides an electrical ground connection to the workpiece.