The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2011
Filed:
May. 13, 2009
Koichi Sentoku, Kawachi-gun, JP;
Takahiro Matsumoto, Utsunomiya, JP;
Satoru Oishi, Utsunomiya, JP;
Hideki Ina, Tokyo, JP;
Koichi Sentoku, Kawachi-gun, JP;
Takahiro Matsumoto, Utsunomiya, JP;
Satoru Oishi, Utsunomiya, JP;
Hideki Ina, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A surface shape measurement apparatus is configured to measure a surface shape of an object to be measured, and includes a beam splitter configured to split white light from a light source into two light beams, a pair of prisms each configured to increase an incident angle of each light beam that has been split by the beam splitter and directed to the object or a reference surface, each prism having an antireflection part that is formed at a period of a wavelength of the white light or smaller and has a moth-eye shape, a superimposition unit configured to superimpose object light from the object with reference light from the reference surface and has passed the second prism, and to generate white interference light, and a Lyot filter configured to discretely separate the white interference light for each of a plurality of wavelengths.