The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2011
Filed:
Jul. 20, 2008
Applicant:
Chao-ching Hsieh, Tai-Nan, TW;
Inventor:
Chao-Ching Hsieh, Tai-Nan, TW;
Assignee:
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a strained silicon transistor is provided. Amorphous silicon is formed below the transistor region before the transistor is formed. By using the tensile/compressive strainer, amorphous silicon is recrystallized to form a strained silicon layer. In addition, the dopants in the well can be driven in and activated by using the same annealing process with the amorphous silicon recrystallization.