The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2011

Filed:

Jun. 20, 2008
Applicants:

Vladislav Davidkovich, Stoneham, MA (US);

Gordon Hill, Arlington, MA (US);

Inventors:

Vladislav Davidkovich, Stoneham, MA (US);

Gordon Hill, Arlington, MA (US);

Assignee:

MKS Instruments, Inc., Andover, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A valve system includes a valve and a controller that controls the valve. The valve includes a valve body, and a motor configured to deliver a torque to the valve body to cause the valve body to move between an open position and a closed position. The controller is configured to drive the motor by applying a current to the motor. The controller is configured to measure the torque delivered by the motor to the valve body, compare the calculated torque with a threshold value, and diagnose a need by the valve system for preventive maintenance when the calculated torque is substantially equal to the threshold value. The threshold value represents substantially the maximum amount of torque available from the stepper motor.


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