The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
May. 06, 2008
Andrew Douglas Bankhead, Leicester, GB;
Ivor Mcdonnell, Leicester, GB;
Andrew Douglas Bankhead, Leicester, GB;
Ivor McDonnell, Leicester, GB;
Taylor Hobson Limited, Leicester, GB;
Abstract
Broadband light is directed along sample and reference paths such that light reflected by a sample surface and light reflected by a reference surface interfere. A mover effects relative movement between the sample and reference surfaces along a scan path. A detector senses a series of light intensity values representing interference fringes produced by a sample surface region during the movement. A data processor processes the intensity values as they are received to produce coherence peak position data and, after completion of a measurement operation, uses this coherence peak position data to obtain data indicative of the height of the surface region. The data processor includes a correlator for correlating intensity values with correlation function data to provide correlation data to enable identification of a position of a coherence peak. A surface topography determiner determines a height of a sample surface region from coherence peak position data.