The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2011
Filed:
Apr. 13, 2006
Huibert Visser, Zevenhuizen, NL;
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Henri Johannes Petrus Vink, Delft, NL;
Huibert Visser, Zevenhuizen, NL;
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Henri Johannes Petrus Vink, Delft, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A system and method are used to form incoherent beams from at least a partially coherent beam, such that interference or speckle patterns are substantially eliminated. A rotating optical element directs the partially coherent beam to reflect from an angular distribution changing element to form an incoherent beam. The partially coherent beam can be directed at varying angles or positions onto the angular distribution changing element through rotation of the rotating optical element. The angles can vary as a function of time.