The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Jun. 25, 2007
Zvi Kotler, Tel Aviv, IL;
Eliezer Lipman, Rishon Lezion, IL;
Golan Hanina, Rishon Lezion, IL;
Boris Greenberg, Jerusalem, IL;
Michael Zenou, Shivai Zion, IL;
Zvi Kotler, Tel Aviv, IL;
Eliezer Lipman, Rishon Lezion, IL;
Golan Hanina, Rishon Lezion, IL;
Boris Greenberg, Jerusalem, IL;
Michael Zenou, Shivai Zion, IL;
Orbotech Ltd., Yavne, IL;
Abstract
A method for micromachining a material, including configuring an optical system to provide illumination of an illumination wavelength to a site via a given element of the optical system, the illumination generating returning radiation from the site. The method further includes configuring the optical system to receive the returning radiation via the given element, and to form an image of the site therefrom, calculating an actual position of a location at the site from the image and outputting a signal indicative of the actual position of the location, generating a beam of micromachining radiation having a micromachining wavelength different from the illumination wavelength, positioning the beam to form an aligned beam with respect to the location in response to the signal, and conveying the aligned beam to the location via at least the given element of the optical system so as to perform a micromachining operation at the location.