The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Jan. 04, 2006
Applicants:
Tomoe Yamamoto, Kanagawa, JP;
Toshihiro Iizuka, Kanagawa, JP;
Inventors:
Tomoe Yamamoto, Kanagawa, JP;
Toshihiro Iizuka, Kanagawa, JP;
Assignee:
Renesas Electronics Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/8242 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a semiconductor device comprising a dielectric film made of a high dielectric constant material, in which a leak current is reduced in the film and which exhibits improved device reliability. Specifically, a dielectric filmis a metal-compound film having a composition represented by the formula MOCNwherein x, y and z meet the conditions: 0<x, 0.1≦y≦1.25, 0.01≦z and x+y+z=2; and M comprises at least Hf or Zr.