The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2011
Filed:
Feb. 05, 2009
Hiroshi Shimatani, Fuchu, JP;
Noriaki Shioyama, Sapporo, JP;
Hiroshi Shimatani, Fuchu, JP;
Noriaki Shioyama, Sapporo, JP;
Tokyo Electron Limited, , JP;
Abstract
Provided is a manufacturing apparatus for appropriately managing information about parts of the manufacturing apparatus. The manufacturing apparatus includes: a parts identification information receiving unit receiving parts identification information used to identify parts of the manufacturing apparatus for performing a semiconductor process with respect to a substrate to be processed; a parts attribute information receiving unit receiving parts attribute information indicating the attribute of the parts identified by the received parts identification information; a parts attribute corresponding information memory unit storing parts attribute corresponding information where the parts identification information identifying the parts of the manufacturing apparatus corresponds to parts attribute information identified by the parts identification information; and a parts attribute corresponding information managing unit updating the parts attribute corresponding information by using the received parts identification information and the received parts attribute information.