The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2011
Filed:
Jun. 17, 2008
Clemens Zapilko, Burghausen, DE;
Thomas Buschhardt, Burghausen, DE;
Diego Feijoo, Burghausen, DE;
Guenter Schwab, Neuoetting, DE;
Clemens Zapilko, Burghausen, DE;
Thomas Buschhardt, Burghausen, DE;
Diego Feijoo, Burghausen, DE;
Guenter Schwab, Neuoetting, DE;
Siltronic AG, Munich, DE;
Abstract
Semiconductor wafers are cleaned using a cleaning solution containing an alkaline ammonium component in an initial composition, wherein the semiconductor wafer is brought into contact with the cleaning solution in an individual-wafer treatment, and in the course of cleaning hydrogen fluoride is added as further component to the cleaning solution, and the cleaning solution has at the end of cleaning, a composition that differs from the initial composition.