The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2011
Filed:
Jun. 12, 2007
Junzo Ishikawa, Kyoto, JP;
Dan Nicolaescu, Kyoto, JP;
Yasuhito Gotoh, Kyoto, JP;
Shigeki Sakai, Kyoto, JP;
Junzo Ishikawa, Kyoto, JP;
Dan Nicolaescu, Kyoto, JP;
Yasuhito Gotoh, Kyoto, JP;
Shigeki Sakai, Kyoto, JP;
Kyoto University, Kyoto, JP;
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Abstract
An ion beam irradiating apparatus has a field emission electron sourcewhich is disposed in a vicinity of a path of the ion beam, and which emits electrons. The field emission electron sourceis placed in a direction along which an incident angle formed by the electronsemitted from the electron sourceand a direction parallel to the traveling direction of the ion beamis in the range from −15 deg. to +45 deg. (an inward direction of the ion beamis +, and an outward direction is −).