The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2011
Filed:
Aug. 08, 2007
Yuko Sasaki, Mito, JP;
Makoto Ezumi, Mito, JP;
Makoto Nishihara, Hitachinaka, JP;
Tsutomu Kawai, Hitachinaka, JP;
Toshiaki Yanokura, Mito, JP;
Yuko Sasaki, Mito, JP;
Makoto Ezumi, Mito, JP;
Makoto Nishihara, Hitachinaka, JP;
Tsutomu Kawai, Hitachinaka, JP;
Toshiaki Yanokura, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In a method of scanning a charged particle beam which can position the scan position to a proper location inside a deflectable range of the scan position of charged particle beam, the scan position of charged particle beam is deflected to a plurality of target objects inside a scan position deflectable region and on the basis of a shift of a target object at a scan location after deflection, the deflection amount at the scan location is corrected.