The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2011
Filed:
May. 06, 2008
Douglas Mckenzie, Easton, PA (US);
David Abdallah, Bernardsville, NJ (US);
Allen G. Timko, Flemington, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
Douglas McKenzie, Easton, PA (US);
David Abdallah, Bernardsville, NJ (US);
Allen G. Timko, Flemington, NJ (US);
M. Dalil Rahman, Flemington, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The invention relates to an antireflective coating composition comprising a polymer, a crosslinker and a thermal acid generator, where the polymer comprises at least one unit of structure (1), at least one unit of structure (2) and at least one structure of structure (3), where Rto Ris independently selected from H and C-Calkyl, R' and R″ is independently selected from H and C-Calkyl, X is C-Calkylene, Y is C-Calkylene. The invention further relates to a process for imaging a photoresist coated over the antireflective coating composition.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile