The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Jan. 12, 2010
Applicants:
Frank Bryant, Denton, TX (US);
Murray Robinson, Corinth, TX (US);
Inventors:
Frank Bryant, Denton, TX (US);
Murray Robinson, Corinth, TX (US);
Assignee:
STMicroelectronics, Inc., Coppell, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/465 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microfabricated structure that includes a first layer of material on a substrate, and a second layer of material over the first layer that forms an encapsulated cavity, and a structural support layer added to the second layer. Openings can be formed in the cavity, and the cavities can be layered side by side, vertically stacked with interconnections via the openings, and a combination of both can be used to construct stacked arrays with interconnections throughout.