The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2011
Filed:
Jul. 08, 2008
Applicants:
Kenji Fujito, Ibaraki, JP;
Hirotaka Oota, Ibaraki, JP;
Shuichi Kubo, Ibaraki, JP;
Inventors:
Assignee:
Mitsubishi Chemical Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A Group-III nitride semiconductor substrate having a flat surface with a dangling bond density of higher than 14.0 nmis produced by cleaning the surface having a dangling bond density of higher than 14.0 nmwith a cleaning agent containing an ammonium salt.