Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using huffman tree for converting writing data in lithographic process

Abstract

A writing apparatus includes a unit storing writing data, a unit which acquires pattern information on patterns defined in the data, a unit which generates a table where each pattern information corresponds to a number of times each pattern information is used, for each predetermined region, a unit which generates a Huffman tree, based on the table, a unit which generates another table where each pattern information corresponds to a variable length binary code generated by encoding each pattern information such that the larger the number of times each pattern information is used, the smaller a value of the code, based on the tree, a unit which produces converted data, which is defined by the data, in the region into a predetermined format using the code, based on the other table, and a unit which writes the patterns defined, onto a workpiece, based on the converted data in the region.