The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Jul. 11, 2006
Ulysses Gilchrist, Reading, MA (US);
Haniel Olivera, Fitchburg, MA (US);
William Fosnight, Carlisle, MA (US);
Richard Pickreign, Harvard, MA (US);
Robert Caveney, Windham, NH (US);
Ulysses Gilchrist, Reading, MA (US);
Haniel Olivera, Fitchburg, MA (US);
William Fosnight, Carlisle, MA (US);
Richard Pickreign, Harvard, MA (US);
Robert Caveney, Windham, NH (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A substrate processing apparatus having a transport apparatus, at least one sensor connected to the transport apparatus and a controller. The transport apparatus is adapted for transporting the substrate between processing stations of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus. The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.