The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Nov. 20, 2008
Min-sub Kang, Gyeonggi-do, KR;
Sang-kil Lee, Gyeonggi-do, KR;
Kwang-sik Kim, Gyeonggi-do, KR;
Kyung-ho Jung, Incheon-si, KR;
Sung-joong Kim, Gyeonggi-do, KR;
Min-Sub Kang, Gyeonggi-do, KR;
Sang-Kil Lee, Gyeonggi-do, KR;
Kwang-Sik Kim, Gyeonggi-do, KR;
Kyung-Ho Jung, Incheon-si, KR;
Sung-Joong Kim, Gyeonggi-do, KR;
Abstract
A pattern is inspected by acquiring a scanning electron microscope picture of an inspection pattern, and acquiring a scanning electron microscope secondary electron signal profile of the inspection pattern. A determination is made as to whether the inspection pattern is defective by comparing the scanning electron microscope picture of the inspection pattern to a scanning electron microscope picture of a sample pattern, and by comparing the scanning electron microscope secondary electron signal profile of the inspection pattern to a scanning electron microscope secondary electron signal profile of a sample pattern.