The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Dec. 09, 2009
Shih-chi Fu, Taipei, TW;
Gwo-yuh Shiau, Hsinchu, TW;
Liang-lung Yao, Taipei, TW;
Yuan-chih Hsieh, Hsinchu, TW;
Feng-jia Shiu, Hsinchu, TW;
Shih-Chi Fu, Taipei, TW;
Gwo-Yuh Shiau, Hsinchu, TW;
Liang-Lung Yao, Taipei, TW;
Yuan-Chih Hsieh, Hsinchu, TW;
Feng-Jia Shiu, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A method for fabricating a backside illuminated image sensor is provided. An exemplary method can include providing a substrate with a front surface and a back surface; forming a first alignment mark for global alignment on the front surface of the substrate; forming a second alignment mark for fine alignment in a clear-out region on the front surface of the substrate; aligning the substrate from the back surface using the first alignment mark; and removing a portion of the back surface of the substrate at the clear-out region for locating the second alignment mark.