The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Feb. 11, 2009
Sia Kim Tan, Singapore, SG;
Guoxiang Ning, Singapore, SG;
Gek Soon Chua, Singapore, SG;
Soon Yoeng Tan, Singapore, SG;
Byoung IL Choi, Singapore, SG;
Jason Phua, Singapore, SG;
Sia Kim Tan, Singapore, SG;
Guoxiang Ning, Singapore, SG;
Gek Soon Chua, Singapore, SG;
Soon Yoeng Tan, Singapore, SG;
Byoung Il Choi, Singapore, SG;
Jason Phua, Singapore, SG;
Chartered Semiconductor Manufacturing, Ltd., Singapore, SG;
Abstract
A method of fabricating a device is presented. The method includes forming a mask that includes multiple images. A substrate is patterned using the mask. An image of the multiple images corresponds to a respective patterning process. The substrate is processed further to complete the processing of the substrate to form the desired function of the device.