The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2011

Filed:

Mar. 28, 2007
Applicants:

Yoshiro Yamanaka, Shizuoka, JP;

Hideo Saito, Shizuoka, JP;

Mitsunori Hayashi, Shizuoka, JP;

Inventors:

Yoshiro Yamanaka, Shizuoka, JP;

Hideo Saito, Shizuoka, JP;

Mitsunori Hayashi, Shizuoka, JP;

Assignee:

NuFlare Technology, Inc., Numazu-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01R 13/648 (2006.01);
U.S. Cl.
CPC ...
Abstract

A substrate earthing mechanism includes a plate-like spring extending toward a substrate in a direction parallel to a surface of the substrate, and a contact portion coupled to a tip end of the plate-like spring for coming into contact with the substrate to thereby provide electrical conduction therebetween. The plate spring and the contact portion are laid out so that a contact position at which the contact portion is in contact with the substrate and a layout position of the plate-like spring are substantially the same in position as each other in a direction at right angles to the substrate surface in the state that the plate spring is out of its elastic deformation.


Find Patent Forward Citations

Yamanaka, Yoshiro. (2011). Substrate earthing mechanism for use in charged-particle beam writing apparatus (U.S. Patent No. 7922501). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7922501

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…