The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Feb. 07, 2008
Hiromi Nitadori, Oshu, JP;
Katsuyuki Hishiya, Oshu, JP;
Hiromi Nitadori, Oshu, JP;
Katsuyuki Hishiya, Oshu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Disclosed is a vertical type heat processing apparatus and a vertical type heat processing method, which can prevent fall down of the boat on a boat carrier mechanism to be caused by an external force, such as an earthquake or the like, by employing a simple structure, while taking a form of the two-boat system. The vertical type heat processing apparatusincludes a heating furnacehaving a furnace port, a coveradapted to close the furnace port, a pair of substrate holding toolseach adapted to hold multiple substrates W in a multistage fashion and configured to be placed on the covervia a heat insulating mount, and a lifting mechanismadapted to raise and lower the coverso as to carry in and carry out each substrate holding toolrelative to the heating furnace. When one substrate holding toolis in the heating furnace, the other substrate holding toolis placed on a substrate-holding-tool tablefor loading the substrates W thereon. Each substrate holding toolis carried between the-substrate-holding-tool tableand the heat insulating mountdue to the substrate-holding-tool carrier mechanism. To the substrate-holding-carrier mechanism, a fall-down prevention memberadapted to control each substrate holding toolis provided.