The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Jan. 18, 2008
Shinichi Kurita, San Jose, CA (US);
Emanuel Beer, San Jose, CA (US);
Hung T. Nguyen, Fremont, CA (US);
Benjamin Johnston, Los Gatos, CA (US);
Fayez E. Abboud, Pleasanton, CA (US);
Shinichi Kurita, San Jose, CA (US);
Emanuel Beer, San Jose, CA (US);
Hung T. Nguyen, Fremont, CA (US);
Benjamin Johnston, Los Gatos, CA (US);
Fayez E. Abboud, Pleasanton, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.