The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2011
Filed:
Dec. 26, 2008
Zachary M. Fresco, Santa Clara, CA (US);
Anh Duong, Union City, CA (US);
Chi-i Lang, Sunnyvale, CA (US);
Nikhil Kalyankar, San Jose, CA (US);
Nicole Rutherford, Saratoga, CA (US);
Alexander Gorer, Los Gatos, CA (US);
Zachary M. Fresco, Santa Clara, CA (US);
Anh Duong, Union City, CA (US);
Chi-I Lang, Sunnyvale, CA (US);
Nikhil Kalyankar, San Jose, CA (US);
Nicole Rutherford, Saratoga, CA (US);
Alexander Gorer, Los Gatos, CA (US);
Intermolecular, Inc., San Jose, CA (US);
Abstract
Compositions comprise a purine compound; an alcohol amine; a quaternary ammonium salt; an amino acid, and optionally an antioxidant. The compositions are useful in post-CMP cleaning processes. One particular advantage of these compositions is that they can effectively remove slurry contamination without increasing the roughness of the copper surface.