The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Aug. 24, 2007
Applicant:
David R. Peale, San Diego, CA (US);
Inventor:
David R. Peale, San Diego, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/32 (2006.01); G02B 6/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.