The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Jun. 19, 2008
Applicant:
Fujio Maeda, Kawasaki, JP;
Inventor:
Fujio Maeda, Kawasaki, JP;
Assignee:
Mitutoyo Corporation, Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
A surface reflection encoder scale is used with a surface reflection encoder for detecting a relative movement amount of a member for making a relative move. The surface reflection encoder scale includes a substrate of the member or a substrate provided on the member and a reflection phase grating provided on the substrate and having asperities for changing a phase of reflected diffracted light on its surface. The asperities of the phase grating are formed of a deposition film of metal silicide and chromium.