The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Dec. 28, 2006
Se-aug Jang, Ichon-shi, KR;
Hong-seon Yang, Ichon-shi, KR;
Tae-hang Ahn, Ichon-shi, KR;
Hynix Semiconductor Inc., Gyeonggi-do, KR;
Abstract
A method for fabricating a semiconductor device includes forming a device isolation structure in a substrate to define active regions, forming a hard mask pattern to open a region defining an active region pattern and to cover the device isolation structure, forming the active region pattern by selectively recessing the device isolation structure formed in the opened region using the hard mask pattern as an etch barrier, removing the hard mask pattern, forming a gate insulation layer over the substrate to cover at least the active region pattern, and forming a gate electrode over the gate insulation layer to cover at least the active region pattern.