The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2011
Filed:
Sep. 30, 2006
Applicants:
Ron Rulkens, Milpitas, CA (US);
Robert D. Tas, Aromas, CA (US);
Shashank Ravindra Kulkarni, Santa Clara, CA (US);
Artur Kolics, Dublin, CA (US);
Nancy E. Gilbert, Berkeley, CA (US);
Inventors:
Ron Rulkens, Milpitas, CA (US);
Robert D. Tas, Aromas, CA (US);
Shashank Ravindra Kulkarni, Santa Clara, CA (US);
Artur Kolics, Dublin, CA (US);
Nancy E. Gilbert, Berkeley, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05C 3/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electroless deposition system includes a deposition solution, and saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million.