The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Feb. 22, 2006
Eric Eva, Aalen, DE;
Wilfried Clauss, Tuebingen, DE;
Eric Eva, Aalen, DE;
Wilfried Clauss, Tuebingen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An optical composite material comprises an amorphous optical material () with a first refractive index (n), into which crystalline nanoparticles () having a second, higher refractive index (n) are embedded, wherein the amorphous material () and the nanoparticles () are resistant to UV radiation. A microlithography projection exposure apparatus comprises a projection objective () with at least one optical element () which is, in particular, operated in transmission and consists of an optical composite material of this type. In a method for producing the optical composite material, crystalline nanoparticles are introduced into the amorphous optical material during flame deposition in a soot or direct process.