The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 15, 2011
Filed:
Jul. 18, 2008
Kazuhiko Kawasaki, Tsukuba, JP;
Satoshi Koga, Tsukuba, JP;
Yoshimasa Suzuki, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki-shi, JP;
Abstract
A shape measuring apparatus includes a probe for scanning across a surface to be measured, while vibrating up and down; a minute-vibration generation section for vibrating the probe up and down; a vertical movement control section for moving the probe up and down to keep a constant contact force or a constant distance between the surface to be measured and the probe; a scanning section for scanning the surface to be measured with the probe; a displacement sensor for measuring the vertical displacement of the probe and outputting a probe displacement signal; and a signal processing section for obtaining information about the contact force or the distance between the surface to be measured and the probe from a high-frequency component of the probe displacement signal, and for obtaining information about profile of the surface to be measured from a low-frequency component of the signal obtained when the surface to be measured is scanned such that the distance or the contact force is kept constant.