The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Feb. 05, 2009
Minoru Yoshida, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kaoru Sakai, Yokohama, JP;
Takafumi Okabe, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Atsushi Shimoda, Hiratsuka, JP;
Kaoru Sakai, Yokohama, JP;
Takafumi Okabe, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An apparatus and method for inspecting defects includes an illuminator for irradiating light having an ultraviolet wavelength emitted from a light source onto a specimen through a reflection objective lens, an image-former for forming an image of light reflected from the specimen by the illumination of the light from the illuminator, which is passed through at least the reflection objective lens, a detector which detects the image of light formed by the image-former with an image sensor, and an image processor for processing a signal output from the detector to detect defects on the specimen. The image sensor is a reverse-surface irradiation type image sensor.