The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Jun. 29, 2007
Anthonius Martinus Cornelis Petrus DE Jong, Pijnacker, NL;
Hans Jansen, Eindhoven, NL;
Marco Koert Stavenga, Eindhoven, NL;
Peter Franciscus Wanten, Mierlo, NL;
Bauke Jansen, Deurne, NL;
Johannes Wilhelmus Jacobus Leonardus Cuijpers, Roermond, NL;
Raymond Gerardus Marius Beeren, Dalhem, BE;
Kornelis Tijmen Hoekerd, Eindhoven, NL;
Anthonius Martinus Cornelis Petrus De Jong, Pijnacker, NL;
Hans Jansen, Eindhoven, NL;
Marco Koert Stavenga, Eindhoven, NL;
Peter Franciscus Wanten, Mierlo, NL;
Bauke Jansen, Deurne, NL;
Johannes Wilhelmus Jacobus Leonardus Cuijpers, Roermond, NL;
Raymond Gerardus Marius Beeren, Dalhem, BE;
Kornelis Tijmen Hoekerd, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.