The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Jun. 28, 2006
Kazuyoshi Eshima, Tosu, JP;
Kazuyoshi Eshima, Tosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A cleaning apparatus includes a cleaning tank () which stores a process liquid used for cleaning a target object (W), a target object holding mechanism () which holds the target object (W) in the cleaning tank (), and a process liquid supply mechanism () which supplies the process liquid to the cleaning tank (). The target object (W) is immersed in the process liquid in the cleaning tank (), and is cleaned while letting the process liquid overflow from the cleaning tank (), thereby cleaning the target object (W). The cleaning apparatus further includes a cover () which covers a liquid surface in the cleaning tank (), a support member () which supports the cover (), and a follow-up mechanism () which moves the cover () such that the cover () follows the liquid surface while the cover () is supported by the support member ().