The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 01, 2011

Filed:

Jul. 24, 2008
Applicants:

Yigal Katzir, Rishon Lezion, IL;

Itay Gur-arie, Rishon Lezion, IL;

Yacov Malinovich, Kiriat Tivon, IL;

Inventors:

Yigal Katzir, Rishon Lezion, IL;

Itay Gur-Arie, Rishon Lezion, IL;

Yacov Malinovich, Kiriat Tivon, IL;

Assignee:

Orbotech Ltd., Yavne, IL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.


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