The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 2011
Filed:
Mar. 04, 2008
Applicants:
Mitsutoshi Yahagi, Tokyo, JP;
Kenichi Abe, Tokyo, JP;
Yuji Araki, Tokyo, JP;
Yoshio Minami, Tokyo, JP;
Tomoyasu Nagayumi, Tokyo, JP;
Inventors:
Mitsutoshi Yahagi, Tokyo, JP;
Kenichi Abe, Tokyo, JP;
Yuji Araki, Tokyo, JP;
Yoshio Minami, Tokyo, JP;
Tomoyasu Nagayumi, Tokyo, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25B 9/04 (2006.01); C25D 17/06 (2006.01); C25D 17/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A conducting belt is used with an anode holder for supplying an electric current to an anode for plating a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating apparatus. The conducting belt includes a belt capable of contacting an outer circumferential edge of the anode and holding the anode.