The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Apr. 09, 2008
Toshihiko Ishihara, San Diego, CA (US);
Toshihiko Ishihara, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An apparatus and method which may comprise a seed laser defining an optical cavity producing an output. An amplifier may amplify the seed laser output. A bandwidth error signal generator may provide a bandwidth error signal from measured bandwidth and a target. A bandwidth selection element, which may comprise an adjustable sized aperture external to the cavity of the seed laser may selectively alter the bandwidth of the seed laser output. A bandwidth control system may control the bandwidth control element and also selectively adjust a differential firing time between the seed laser and amplifier or another bandwidth selection actuator to cooperated (coarsely or finely) with the bandwidth selection element to control bandwidth of the laser system.