The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Nov. 14, 2007
Roberto B. Wiener, Ridgefield, CT (US);
Santiago E. Del Puerto, Milton, NY (US);
Roberto B. Wiener, Ridgefield, CT (US);
Santiago E. Del Puerto, Milton, NY (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A system is configured to compensate for guide flatness errors and/or shifting of a support. The system can include one or more support devices, fluid or magnetic bearings to guide the one or more support devices along a guide, and a compensation system. The compensation system is coupled to respective ones of the one or more support devices adjacent to each of the fluid or magnetic bearings. The compensation system is configured to generate a rotational motion that compensates for tilting in the support devices compensate for any non-straight areas of the guide or shifting (e.g., thermal shifting) of the support devices, which is done through moving of the support devices with respect to the guides during movement of the support devices along the guide.