The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Jul. 24, 2009
Karl W. Barth, Poughkeepsie, NY (US);
Jeffrey P. Gambino, Westford, VT (US);
Tom C. Lee, Essex Junction, VT (US);
Kevin S. Petrarca, Newburgh, NY (US);
Karl W. Barth, Poughkeepsie, NY (US);
Jeffrey P. Gambino, Westford, VT (US);
Tom C. Lee, Essex Junction, VT (US);
Kevin S. Petrarca, Newburgh, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of forming a programmable fuse structure includes forming at least one shallow trench isolation (STI) in a substrate, forming an e-fuse over the at least one STI and depositing an interlevel dielectric (ILD) layer over the e-fuse. Additionally, the method includes removing at least a portion of the at least one STI under the e-fuse to provide an air gap below a portion of the e-fuse and removing at least a portion of the ILD layer over the e-fuse to provide the air gap above the portion of the e-fuse.